E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdPbc-0814 defect classification code management

defect classification code management

particularly SEMI P35

The database includes over 1

SEMI E125-1224 (technical revision)

E This standard was editorially modified in February 2007 to correct an error

E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdPbc-0814 defect classification code managementThe purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates. This Guide contains definitions